3  0.000506339999997607  0.00212970000000112  0.00131801999999936  0.000811680000001758  # Be2
3  0.0567518699999994  0.0836156499999845  0.0701837599999919  0.0134318899999926  # et
3  0.00305417999999236  0.0242420399999901  0.0136481099999912  0.0105939299999989  # F2
3  0.0390774699999952  0.0437587899999983  0.0414181299999967  0.00234066000000155  # H2O
3  0.000268419999999603  0.000215520000000025  0.000241969999999814  -2.64499999997891e-05  # H4
3  0.00213768999999786  0.00605267000001675  0.0040951800000073  0.00195749000000944 # HF
3  0.101855049999983  0.11165385000001  0.106754449999997  0.00489940000001354 # N2